How to maintain and maintain the vacuum coating machine- Ningbo Honyu Vacuum Technology Co., Ltd.

How to maintain and maintain the vacuum coating machine

In order to reach the ideal vacuum, the vacuum coating machine must be equipped with a vacuum pumping system, then the diffusion pump is one of the essential pumping components of the vacuum coating machine. Pump maintenance is essential. Today, the editor of Huicheng Vacuum will sort out the maintenance steps of the diffusion pump of the vacuum coating machine in detail. I hope it can help you:

1. During the operation of the vacuum coating machine, the cooling water of the diffusion pump must be kept unobstructed. After the heating is stopped, the cooling water must be turned off after the working fluid of the pump has been completely cooled.

2. When the diffusion pump stops working, it should be noted that the vacuum state should be maintained in the pump to avoid deterioration of the pump oil.

3. The gas to be pumped should be dry, non-corrosive and dust-free.

4. If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to avoid pump oil pollution and corrosion of various parts and blow out the remaining water in the cooling water jacket. The room temperature to keep the venue should be between 10-40 degrees Celsius.

5. The performance of the diffusion pump will gradually deteriorate after long-term operation, and should be checked regularly. Such as: whether the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; parts and pump chambers are first cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100 degrees Celsius or dried with a hair dryer . After the treatment, assemble them in order, keep the pump core and the pump bottom vertical and concentric with the pump cavity, and adjust the gaps of the nozzles at all levels according to the original requirements.

6. After the water has evaporated and dried, install the pump core, add new diffusion pump oil, put it back into the body, connect the water pipe, and install the electric hob, then it can be restarted.

7. Before restarting the machine, pay attention to leak detection. The method is: start the maintenance pump, close the door of the vacuum chamber, and after a few minutes, observe whether the vacuum degree is 6*10 0 Pa, otherwise, conduct a leak detection, check whether the sealing rubber ring is missing at the connection, or the sealing ring is crushed. Heating can only be done after eliminating the hidden danger of air leakage, otherwise the diffusion pump oil will burn out and cannot enter the working state.

During the operation of the vacuum coating machine, although the maintenance of the diffusion pump is essential, the vacuum coating machine is composed of many components, and the failure of one component will directly affect the normal operation of the vacuum coating machine. The maintenance of the diffusion pump is essential, and the maintenance of other components is also indispensable.