Use steps of PVD coating equipment
Before use, each power switch and operation button should be in the off position, and connect the water source, gas source and power source.
1. Turn on the vacuum control power switch.
2. Turn on the maintenance pump to pump a low vacuum to the diffusion pump, and measure the vacuum degree of the front stage.
3. After the pre-stage pressure reaches 5*100, turn on the diffusion pump for heating.
4. Open the inflation valve, inflate the coating chamber, open the door of the coating chamber, install the cleaned workpiece, and close the furnace door.
5. After the diffusion pump has been working normally for one hour, turn on the mechanical pump and open the pre-pumping valve, manually evacuate the vacuum chamber to 1*103, and then turn on the Roots pump.
6. When the pressure reaches 3*100, close the pre-pumping valve and open the pre-stage valve. Open the high-true valve and pump a high vacuum to the coating chamber.
7. When the vacuum chamber pressure reaches 8*10-3 (the specific pressure value is determined according to the process requirements), the workpiece is turned on and heated to the set value.
8. Start the coating operation procedure.
9. The coating operation procedure ends.
10. Lower the temperature of the furnace to below 100℃, open the inflatable valve and open the furnace door to take out the workpiece, and clean the furnace before each furnace is used.